How to choose backing plates for your targets?, Manufacturers, Wholesalers
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How to choose backing plates for your targets?

backing Plate.jpg


The functions of backing plate are: 
   supporting the target esp. the weak target materials during sputtering such as ceramic and soft metallic materials
    provide heat extraction(cooling) from Sputtering process
   Sealing from magnetron cooling system and vacuum chamber 

Selection of Backing Plate materials where the following factors must be considered: 
   Thermal Expansion of the Backing plate materials and Sputtering target. 
    Electrical Conductivity 
   Mechanical Properties to withstand the cooling water pressure and thermal cycling effect.
   Reusable

Backing plate materials commonly used are: 
   Oxygen Free Copper

 The most commonly backing materials is is Oxygen Free Copper (OFHC) .This is readily available metal has good thermal conductivity and electrical conductivity, while also being easy to machine. Copper backing plates can be re-used, with care, twenty times or more.
    Molybdenum Backing Plate.

Molybdenum Backing Plate is suitable for high temperature bond , while copper may also oxidize badly or warp, and also matching with target materials where copper coefficient of expansion is mismatched, such as ceramics.
    Aluminium Backing plate.

 Similarly for high thermal conductivity and matching to the target materials coefficient of expansion as well as suitable for diffusion bonding.
   Stainless steel. Commonly used for Rotatable sputtering target where it provide a low cost recyclable backing tube. 

Moreover, copper zinc (CuZn) alloy and copper chromium (CuCr) alloy backing plate are also available in our plant. 

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